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DuPont Kalrez

 

Semiconductor Processing Seals for Plasma, Wet Chemistry & Thermal Applications

They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. In a number of fabrication customer evaluations, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.

 

DuPont Kalrez Solutions


Plasma
  • Kalrez® 9100 HDPCVD/PECVD/ALD
  • Kalrez® 9300 Dielectric (Oxide) Etch
  • Kalrez® 9500 Conductor (Poly) Etch/SACVD/Ash/Strip
Wet
  • Kalrez® 6375UP General Purpose Product For Most Wet Processes
Thermal
  • Kalrez® 8900 General Purpose Product For Most Thermal Processes

 

Semiconductor Processing Seals For Field-Proven Contamination Control

Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.

Kalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.

Operations Improvements

Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:

  • Deposition
  • Etch
  • Ash/strip
  • Thermal
  • Wet

Better Performance for Spansion

Spansion, the largest provider of flash memory solutions, turned to DuPont for material options that would produce longer seal life with reduced particle generation. High particle count and leaks from seal erosion and compression set caused seal issues in multiple processes. Kalrez® 9100 parts exhibited significantly less seal erosion, reduced particle generation, and provided better elastic recovery characteristics. View Spansion Semiconductor O-rings Case Study

A Proven Leader

We can show numerous Case Study reports showing how users have increased performance and in-service life by upgrading from other materials to Kalrez.® For example, when the International Research Center in Belgium (IMEC) tested Kalrez® 9100 seals versus incumbent seals in an isolation valve and top nozzle position, the 9100 seals appeared undamaged and exhibited no sign of cracking after 5000 cycles.

These results inspired IMEC to change the perfluoroelastomer seals on all positions to Kalrez® 9100 seal View the IMEC Case Study

We’re here to help…

Here at IES we work diligently to understand your application goals, configure the best solution, and ensure you get the results possible. Have questions or looking for advice? Give us a call, or click the link below to send a message to an expert today describing your requirements.