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Thermal Semiconductor Processing Seals

Kalrez® 8900

DuPont™ Kalrez® 8900 perfluoroelastomer parts are a black product for all thermal processes, e.g., oxidation, diffusion furnace, metal CVD, ALD and LPCVD. It offers outstanding thermal stability, very low outgassing and excellent (low) compression set properties. Kalrez® 8900 parts exhibit excellent retention of physical properties at elevated temperatures, have excellent mechanical strength and are well-suited for both static and dynamic sealing applications. A maximum continuous service temperature of 325 °C is suggested. Short excursions to higher temperatures may also be possible. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8900 parts.