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  7. Planar Magnetrons

Planar Magnetrons

Circular

Better designs, more choice. Since not all sputter processes are the same, neither are our magnetrons. Available from 2″ to 16″ with various magnetic and mechanical options and Speedflo add-on.

Rectangular

Get more from your sputter processes. That’s more up-time, more rate, more magnetic options – and more return on your investment. Gencoa advanced simulation capabilities are used to meet every requirement in your sputtering application.

Magnetic Option

Integrated solutions and in-depth process knowledge means a production ready package with highly innovative designs created for your deposition tools. Options include designs for ferromagnetic sputtering, full face erosion and low/high ion bombardment.