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Rotatable Magnetrons

GRS

Gencoa have developed a new type of small tube magnetron – the Gencoa Rotatable System (GRS). GRS is different to all other designs on the market (patent pending) and allows easy retro-fitting into Gencoa standard planar magnetron sized flanges.

The GRS75 has been developed primarily to allow conversion of existing planar magnetron sputter systems to use rotatable technology. This is achieved by the narrow end-block ensuring the target length and uniformity matches the existing planar target length.