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Speedflo Reactive Process Controllers

Speedflo

Speedflo

Speedflo

Speedflo

Speedflo is a multi-channel closed-loop control system for high-speed adjustment of a reactive gas during magnetron sputter processes.

Its advanced digital control system automatically regulates gas flow to meet reactive sputtering requirements.

Speedflo’s advanced variable structure control algorithm offers significant performance improvements over conventional PID control techniques, both in terms of speed and robustness.