SDE Series

Standard Type for Harsh Process

SDE Series

SDE Series

The SDE Series by Kashiyama is designed for large capacity applications (120,000 SLPM and up). The advanced vertical screw design provides outstanding reliability for harsh duty applications.

SDE Series Features

  • Available up to 200kL/min.
  • Best for large wafer and FPD.
  • Durable to various processes.