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Film Thickness Instrumentation

For real-time thin film thickness and deposition rate control, quartz crystal (QCM) controllers are very reliable and time tested technology. Telemark supplies complete quartz crystal measuring systems to meet our customers’ demands. Telemark 800 series units come complete with oscillator, cables and hand-held remote.

861 Quartz Crystal Deposition Controller

861 Quartz Crystal Deposition Controller
861 Quartz Crystal Deposition Controller

The NEW Telemark 861 electron beam source quartz crystal (QCM) deposition controller is a drop-in replacement for the Maxtek 360 and Telemark 860 units. This controller provides pin for pin replacement for old Maxtek and Telemark units. Users can transfer existing processes and setup configurations from old units directly to the 861. The 861 is also an excellent replacement for the IC6, IC5, XTC3, XTC2, SQC-310 and IC6000.

880 Deposition Controller

880 Deposition Controller
880 Deposition Controller

The Model 880 quartz crystals (QCM) deposition controller is based on a multi-microprocessor design, which enables rapid measurement updates with superior resolution. It features an LCD touch screen for programming and displaying process data and graphs, as well as modular architecture. The unit has four slots for I/O cards; each slot can house either an input card (8 opto-isolated inputs) or an output card (8 SPDT relays). The sensor-head/source control modules provide two channels each for crystal frequency measurement and two separate, isolated analog 0-10 VDC (+ and – polarity) outputs for source control or recorders. The 880 can house four such modules, supporting up to eight channels of sensor input and 8 analog outputs, and enabling averaging between several sensor crystals.

851 Quartz Crystal Thickness Monitor

851 Quartz Crystal Thickness Monitor
851 Quartz Crystal Thickness Monitor

The NEW Telemark 851 Quartz Crystal (QCM) Thickness Monitor

Modern color LCD touch screen interface and capability for I/O upgrades and additional sensor heads makes this tool excellent for system upgrades and OEM users alike.

The unit contains an extensive material library and user definable materials.

Proprietary oscillator for 5MHZ or 6MHz operation and high resolution of < 0.01A

Unit comes standard with 2 sensor inputs.